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Title | Microactuated Micro-xyz Stages For Free-space Micro-optical Bench - Micro Electro Mechanical Systems, 1997. MEMS ' 97, Proceedings, IEEE., Tenth Annua | |
File Name | Lin - Microactuated Micro-XYZ stages for free-space micro-optical bench.pdf - 790.40 KB | |
Pages | 6 pages | |
Owner | berkeley.edu | |
Author | IEEE | |
Creation date | 21 years ago | |
Nb of downloads | 143 |
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