INTERACTIONS OF Si III SURFACE WITH H2 NH3 SiH4 MULTIPOLAR PLASMAS STUDIED BY IN SITU ELLIPSOMETRY.pdf
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| Title | INTERACTIONS OF Si (III) SURFACE WITH H2, NH3, SiH4 MULTIPOLAR PLASMAS STUDIED BY IN SITU ELLIPSOMETRY | |
| File Name | ajp-jphyscol198344C1053.pdf - 282.93 KB | |
| Pages | 5 pages | |
| Owner | archives-ouvertes.fr | |
| Author | Y. Demay, P. Maurel, S. Gourrier | |
| Creation date | 4 years ago | |
| Nb of downloads | 20 | |
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